Nanoscience and Nanotechnology Faculty
Professor, Microsystems Group
NanoTECH Research Area Affiliations
Research Summary
Dr. Allen’s current research interests are in the field of micromachining and in microsensor and microactuator fabrication that is compatible with the IC fabrication. Other interests are in micromachined pressure and in acceleration sensors, micromotors, in integrated flow valves, in piezoelectric materials combined with semiconductor circuits and optical materials, in multi-chip packaging for integrated circuits and microstructures, in integration of organic piezoelectric materials with semiconductor circuits for sensing and actuation, and in materials and mechanical property issues in micromachining. Specific research projects that have recently received media attention are: 1) magnetically actuated microrelays, smaller than a dime, that have potential use in automobile electronics, test equipment, and other areas where low actuation voltages are required, and 2) drug delivery via microneedles, tiny chips containing arrays of tiny needles, each thinner than a human hair, that can potentially be put on the skin for one-time injections and possibly left on the skin for continuous release of a medication under the control of a microprocessor.
